SE is an technique; it does not measure thickness directly. Instead, researchers use the measured Δcap delta
Captures the final signal across the entire spectrum. The Role of Data Modeling Spectroscopic Ellipsometry
The name "ellipsometry" comes from the fact that linearly polarized light often becomes after reflecting off a surface. Unlike standard reflectometry, which measures the total intensity of reflected light, SE measures two specific parameters: SE is an technique; it does not measure thickness directly
Can resolve the individual properties of many stacked layers simultaneously. SE is an technique
Can detect films thinner than a single nanometer.